[invited] Multi Patterning Techniques for Manufacturability Enhancement in Optical Lithography
- Publication Type
- Conference Paper
- Authors
- Atsushi Takahashi
- Ahmed Awad
- Yukihide Kohira
- Tomomi Matsui
- Chikaaki Kodama
- Shigeki Nojima
- Satoshi Tanaka
The abstract has not been published since it was an invited talk
Conference
- Conference Title
- Proc. the 2014 International Conference on Integrated Circuits, Design, and Verification (ICDV 2014)
- Conference Country
- Vietnam
- Conference Date
- Nov. 11, 2014 - Nov. 14, 2014
- Conference Sponsor
- IEICE