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[invited] Multi Patterning Techniques for Manufacturability Enhancement in Optical Lithography
[invited] Multi Patterning Techniques for Manufacturability Enhancement in Optical Lithography
Publication Type
Conference Paper
Authors
Atsushi Takahashi
Ahmed Awad
Yukihide Kohira
Tomomi Matsui
Chikaaki Kodama
Shigeki Nojima
Satoshi Tanaka
The abstract has not been published since it was an invited talk
Conference
Conference Title
Proc. the 2014 International Conference on Integrated Circuits, Design, and Verification (ICDV 2014)
Conference Country
Vietnam
Conference Date
Nov. 11, 2014 - Nov. 14, 2014
Conference Sponsor
IEICE