Ferroelectrics lead zirconate titanate (PZT) thin films were fabricated by pulsed laser deposition on Pt coated Si substrate. The effect of oxygen partial pressure, substrate temperature and time of ablation on the film orientation and composition will be presented. It was found that highly (111) textured PZT films could be grown with careful selection of ablation conditions which are: the oxygen pressure is 300 mT, substrate temperature is 605 C and the ablation time is 16 minutes.

Title

An-Najah University Journal for Research - Natural Sciences (A) ISSN: 1727-2114

Publisher

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Publisher Country

Palestine

Publication Type

Both (Printed and Online)

Volume

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Year

2002

Pages

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