[invited] Multi Patterning Techniques for Manufacturability Enhancement in Optical Lithography
- نوع المنشور
- ورقة مؤتمر
- المؤلفون
- Atsushi Takahashi
- Ahmed Awad
- Yukihide Kohira
- Tomomi Matsui
- Chikaaki Kodama
- Shigeki Nojima
- Satoshi Tanaka
The abstract has not been published since it was an invited talk
المؤتمر
- عنوان المؤتمر
- Proc. the 2014 International Conference on Integrated Circuits, Design, and Verification (ICDV 2014)
- دولة المؤتمر
- فيتنام
- تاريخ المؤتمر
- 11 نوفمبر، 2014 - 14 نوفمبر، 2014
- راعي المؤتمر
- IEICE